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Robots

  • RR75*
    - All Axis installed Stepping Motor
    - 2Port can be Accessed without Drive-axis (ABS Encoder)
    - High arm rigidity, capable to adopt heavy Hand (RR756、RR757、RR759)
    - High Throughput by Double Arm Spec
    - Controllable to Robot driver-axis
    - Able to access every direction(RR759)
  • RR73B
    - Install ABS Encoder for every axis, Stepping Servo Motor
    - Up to 4Port can be Accessed without Drive-axis
    - Dual Blade
    - Space-Saving
  • RR481
    - Small Foot-Print
    - Able to use Long Finger because of Long Reach
    - Capable to Small size of Opening Gate (15mm)
    - High quality of precision
    - Capable to Ultra-high vacuum
    - High Throughput
    - Capable to AWC option (Adjust Wafer position)
  • RR352L 352S
    - High speed Loading by S-shaped Acceleration Control
    - Prevent from particle generation by flow-magnetic seal and Filter
    - Switching the Chamber of upper surface Systems to easy to exchange/maintenance the Robot
    - Symmetry Finger Type and SEMI complied Arm Type
  • RR493
    - Small Foot-Print
    - Able to use Long Finger because of Long Reach
    - Able to access narrow Gate (15mm)
    - High quality of precision
    - Capable to Ultra-high vacuum
    - High Throughput
    - Capable to AWC option (Adjust Wafer position)
  • RR492
    - High quality of precision
    - Capable to Ultra-high vacuum
    - High Throughput
    - Capable to AWC option (Adjust Wafer position)
  • RR491
    - High quality of precision
    - Enable to Ultra-high vacuum
    - High Throughput
    - Capable to AWC option (Adjust Wafer position)