This equipment is Wafer Sorter Station which capable to 300mm Loading FOUP/FOSB. It performs Wafer’s Dumping, Alignment and OCR Reading. It is composed of Wafer transferring Unit, Load Port, Aligner, OCR. It is capable to apply FFU, CCD Camera ,Ionizer’s various requests and easy to Maintenance.
Wafer transferring unit It is composed by WTR and Linear Stage for access the Wafer inside of FOUP.
Load Port- Open and close the 300mm Wafer FOUP.
- It does correspond to RGV, AGV, OHT, and manufactured by Semi standards.
Aligner / OCR- The equipment that Aligning Notch and ID Reading for Wafer
FFU Module Filter Module which for keep high Clean class in Sorter.
OP Panel Operation Panel which equipped by convenient to use(control).
Performance of equipment
- Wafer size : 300mm Silicon Wafer
- Carrier : 25 Wafers
- Load port Configuration : 300mm LPM (4FOUP)