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Vacuum Platform

  • PLVS
    - Optimal configuration of system – At least Foot-Print
    - Load Cleanly
    - Respond to Ultra-high vacuum
    - High Throughput
  • RI150
    - Size : 300mm, 200mm, 150mm, Squared
    - Respond to Ultra-high vacuum
    - Operating Speed:3Sec/360deg
    - Resolution:0.000343deg/Pulse
    - Load Weight :Max 1kg
    - Repeatability:±0.02deg
  • RE161
    - Respond to Ultra-high vacuum by Bellows structure
    - Motion of Stroke : 70mm or 300mm
    - Load Weight : 50kg
    - Repeatability : ±0.05mm